Publication:

Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide

Date

2022
Journal article
https://doi.org/10.1021/acs.chemmater.2c02292
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

RuO2 ALD main.pdf 6.57 MB
Accepted version 2.02 MB

Author(s)

Poonkottil, Nithin
;
Minjauw, Matthias M.
;
Werbrouck, Andreas
;
Checchia, Stefano
;
Solano, Eduardo
;
Nisula, Mikko
;
Franquet, Alexis  
;
Detavernier, Christophe
;
Dendooven, Jolien

Journal

CHEMISTRY OF MATERIALS

Abstract

Description

Statistics

Downloads

1597 since deposited on 2022-10-12
242last month
62last week
Acq. date: 2026-08-21

Views

1672 since deposited on 2022-10-12
5last month
Acq. date: 2026-08-21

Citations

Statistics

Downloads

1597 since deposited on 2022-10-12
242last month
62last week
Acq. date: 2026-08-21

Views

1672 since deposited on 2022-10-12
5last month
Acq. date: 2026-08-21

Citations