Publication:

Atomic Layer Deposition of Ruthenium Dioxide Based on Redox Reactions between Alcohols and Ruthenium Tetroxide

Date

2022-09-21
Journal article
https://doi.org/10.1021/acs.chemmater.2c02292
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RuO2 ALD main.pdf 6.57 MB
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Author(s)

Poonkottil, Nithin
;
Minjauw, Matthias M.
;
Werbrouck, Andreas
;
Checchia, Stefano
;
Solano, Eduardo
;
Nisula, Mikko
;
Franquet, Alexis  
;
Detavernier, Christophe
;
Dendooven, Jolien

Journal

CHEMISTRY OF MATERIALS

Abstract

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1266 since deposited on 2022-10-12
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1667 since deposited on 2022-10-12
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