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O2 post deposition anneal of Al2O3 blocking dielectric for higher performance and reliability of TANOS flash memory

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2093 since deposited on 2021-10-18
3last month
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Acq. date: 2026-08-21

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Views

2093 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-08-21

Citations