Browsing by Author "Nechaev, Konstantin"
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Publication Feature grouping to enable edge placement error-aware process control in multi-feature logic use case
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 129550OPublication Pattern selection strategy by clustering for logic EPE monitoring
Publication Unsupervised Pattern Classification for Dual-Layer EPE Characterization in Advanced Logic Devices