Publication:

Feature grouping to enable edge placement error-aware process control in multi-feature logic use case

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010421
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Published version 1.86 MB

Author(s)

Schelcher, Guillaume  
;
Athayde, Marsil
;
Schoofs, Stijn  
;
Hsia, Jeff
;
Khalik, Zuan
;
Li, Fahong
;
Nechaev, Konstantin
;
Sahraeian, Reza
;
Tamaddon, Amir-Hossein  
;
Blanco, Victor  
;
van der Sanden, Stefan
;
Zhang, Yichen
;
Anunciado, Roy
;
Dillen, Harm
;
Leray, Philippe  

Journal

Proceedings of SPIE

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