Publication:

Pattern selection strategy by clustering for logic EPE monitoring

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3034649

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Author(s)

;

Nechaev, Konstantin

;

Sahraeian, Reza

;

Schouwenberg, Jeroen

;

Schelcher, Guillaume

;

Das, Shubhankar

;

;

van der Sandena, Stefan

;

Journal

Proceedings of SPIE

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109 since deposited on 2025-05-11

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Acq. date: 2026-08-21