Publication:
Influence of hydrogen on chemical vapor deposition of tungsten on sputter-deposited TiN layers
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1950 since deposited on 2021-09-29
2last month
Acq. date: 2026-10-13
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Statistics
Views
1950 since deposited on 2021-09-29
2last month
Acq. date: 2026-10-13
Citations