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Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin films
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1893 since deposited on 2021-10-20
1last month
Acq. date: 2026-06-03
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Views
1893 since deposited on 2021-10-20
1last month
Acq. date: 2026-06-03
Citations