Publication:

Low Landing Energy as an Enabler for Optimal Contour Based OPC Modeling in the EUV Era

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3010898
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Published version 1.79 MB

Author(s)

Alkoken, Ran
;
Baram, Mor
;
Oron, Gadi
;
Schuch, Nivea
;
Robert, Frederic
;
Figueiro, Thiago
;
Brand, Omri
;
Geta, Matan
;
Saha, Kasturi
;
Miller, Elias
;
Zavhon, Tal
;
Tiwari, Dipayan
;
Singh, Deepakkumar
;
Sarkar, Sujan Kumar  
;
Rincon Delgadillo, Paulina  
;
Lorusso, Gian  
;
Beral, Christophe  
;
Wei, Chih-I
;
Curvacho, Gabriel
;
Kim, Young Chang
;
Fenger, Germain

Journal

Proceedings of SPIE

Abstract

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331 since deposited on 2024-06-15
17last month
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664 since deposited on 2024-06-15
Acq. date: 2026-05-31

Citations