Publication:
Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1912 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-10-12
Citations
Statistics
Views
1912 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-10-12
Citations