Publication:

Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing

Date

2011
Journal article
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Author(s)

Hellings, Geert  
;
Rosseel, Erik  
;
Simoen, Eddy  
;
Radisic, Dunja  
;
Petersen, Dirch Hjorth
;
Hansen, Ole
;
Nielsen, Peter Folmer
;
Zschaetzsch, Gerd
;
Nazir, Aftab  
;
Clarysse, Trudo
;
Vandervorst, Wilfried  
;
Hoffmann, Thomas Y.
;
De Meyer, Kristin  

Journal

Electrochemical and Solid-State Letters

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2024 since deposited on 2021-10-19
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