Publication:

Self-assembled monolayers assisted pore sealing of k 2.0 dielectrics

Date

2013
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

26803.pdf 905.35 KB

Author(s)

Armini, Silvia  
;
Sun, Yiting  
;
Loyo Prado, Jana  
;
Baumans, Kim  
;
De Cooman, Johan  
;
Redzheb, Murad
;
Verdonck, Patrick  
;
Swerts, Johan  
;
Baklanov, Mikhaïl
;
Struyf, Herbert  

Journal

Abstract

Description

Statistics

Views

1927 since deposited on 2021-10-21
1last month
Acq. date: 2026-06-01

Citations

Statistics

Views

1927 since deposited on 2021-10-21
1last month
Acq. date: 2026-06-01

Citations