Publication:

Influence of the ion bombardment of O2 plasmas on low-k materials

Date

2011

Journal article

https://doi.org/10.1016/j.tsf.2011.06.046

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23118.pdf 684.37 KB

Author(s)

Verdonck, Patrick

;

Samara, Vladimir

;

;

Ferchichi, Abdelkarim

;

Van Besien, Els

;

Baklanov, Mikhaïl

;

Braithwaite, Nicholas

Journal

Thin Solid Films

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1926 since deposited on 2021-10-19

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Acq. date: 2026-08-16