Publication:

WS2 transistors on 300 mm wafers with BEOL compatibility

Date

2017

Proceedings Paper

Simple item page Full metadata Statistics

Files

35942.pdf 3.18 MB

Author(s)

;

;

Groven, Benjamin

;

;

;

;

Devriendt, Katia

;

Delabie, Annelies

;

;

;

Chiappe, Daniele

;

Asselberghs, Inge

;

;

Huyghebaert, Cedric

;

;

Juncker, Aurélie

;

;

Statistics

2 since deposited on 2021-10-24

Acq. date: 2026-05-30

1996 since deposited on 2021-10-24

Acq. date: 2026-05-30