Publication:

Cost-effective cleaning for advanced Si-processing

Date

1998

Proceedings Paper

Simple item page Full metadata Statistics

Files

2943.pdf 557.26 KB

Author(s)

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Cornelissen, Ingrid

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De Gendt, Stefan

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Loewenstein, Lee

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Schaekers, Marc

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Statistics

1997 since deposited on 2021-09-30

Acq. date: 2026-05-30