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Modeling the effect of charges in the back side passivation layer on through silicon via (TSV) capacitance after wafer thinning

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1965 since deposited on 2021-10-22
2last month
Acq. date: 2026-10-12

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Views

1965 since deposited on 2021-10-22
2last month
Acq. date: 2026-10-12

Citations