Publication:
Contact hole metrology study: understand the electron beam interaction with photoresist and how to minimize its impact
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60 since deposited on 2025-08-03
6last month
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Acq. date: 2026-08-20
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Statistics
Views
60 since deposited on 2025-08-03
6last month
2last week
Acq. date: 2026-08-20
Citations