Publication:
Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications
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Acq. date: 2026-10-13
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Downloads
377 since deposited on 2021-11-02
44last month
10last week
Acq. date: 2026-10-13
Views
1960 since deposited on 2021-11-02
17last month
7last week
Acq. date: 2026-10-13
Citations