Publication:

Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications

Date

2020
Journal article
https://doi.org/10.1149/2162-8777/abd260
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Author(s)

Nagano, Fuya  
;
Iacovo, Serena  
;
Phommahaxay, Alain  
;
Inoue, Fumihiro  
;
Sleeckx, Erik  
;
Beyer, Gerald  
;
Beyne, Eric  
;
De Gendt, Stefan  

Journal

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY

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