Publication:

Integrated approach to improving local CD uniformity in EUV patterning

Date

2017
Proceedings Paper
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

35714.pdf 782.65 KB

Author(s)

Liang, Andrew
;
Hermans, Jan  
;
Tran, Tim
;
Viatkina, Katja
;
Liang, Chen-Wei
;
Ward, Brandon
;
Chuang, Steven
;
Yu, Jengyi
;
Harm, Greg
;
Vandereyken, Jelle  
;
Rio, David  
;
Kubis, Michael
;
Tan, Samantha
;
Wise, Rich
;
Dusa, Mircea  
;
Reddy, Sirish
;
Singhal, Akhil
;
Van Schravendijk, Bart
;
Dixit, Girish  
;
Shamma, Nader

Journal

Abstract

Description

Statistics

Views

1993 since deposited on 2021-10-24
5last month
1last week
Acq. date: 2026-08-19

Citations

Statistics

Views

1993 since deposited on 2021-10-24
5last month
1last week
Acq. date: 2026-08-19

Citations