Publication:

Dry-Etching Processes for High-Aspect-Ratio Features with Sub-10 nm Resolution High-chi Block Copolymers

Date

2021
Journal article
https://doi.org/10.1021/acsami.1c13503
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Accepted version 1.44 MB

Author(s)

Pound-Lana, Gwenaelle
;
Bezard, Philippe  
;
Petit-Etienne, Camille
;
Cavalaglio, Sebastien
;
Cunge, Gilles
;
Cabannes-Boue, Benjamin
;
Fleury, Guillaume
;
Chevalier, Xavier
;
Zelsmann, Marc

Journal

ACS APPLIED MATERIALS & INTERFACES

Abstract

Description

Statistics

Downloads

2337 since deposited on 2023-06-20
79last month
Acq. date: 2026-06-04

Views

1169 since deposited on 2023-06-20
Acq. date: 2026-06-04

Citations

Statistics

Downloads

2337 since deposited on 2023-06-20
79last month
Acq. date: 2026-06-04

Views

1169 since deposited on 2023-06-20
Acq. date: 2026-06-04

Citations