Publication:
3D site specific sample preparation and analysis of 3D devices (Finfets) by atom probe tomography
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1993 since deposited on 2021-10-20
2last month
Acq. date: 2026-05-29
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Statistics
Views
1993 since deposited on 2021-10-20
2last month
Acq. date: 2026-05-29
Citations