Publication:
Electrical properties and noise of poly SiGe deposited at temperatures compatible with MEMS integration on top of standard CMOS
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1878 since deposited on 2021-10-14
1last month
Acq. date: 2026-10-13
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Statistics
Views
1878 since deposited on 2021-10-14
1last month
Acq. date: 2026-10-13
Citations