Publication:
Pattern collapse of high-aspect-ratio silicon nanostructures - A parametric study
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2011 since deposited on 2021-10-23
22last month
6last week
Acq. date: 2026-10-12
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Statistics
Views
2011 since deposited on 2021-10-23
22last month
6last week
Acq. date: 2026-10-12
Citations