Publication:

Towards improved atom probe tomography analysis of semiconductors: unraveling the dynamic evolution of the semiconductor emitter

Date

2021-12
Dissertation
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.departmentff90453d-848e-4401-ab8e-3073d752afb9
cris.virtualsource.orcidff90453d-848e-4401-ab8e-3073d752afb9
dc.contributor.advisorVandervorst, W.
dc.contributor.advisorFleischmann, C.
dc.contributor.authorOp de Beeck, Johan
dc.date.accessioned2026-05-29T14:44:15Z
dc.date.available2026-05-29T14:44:15Z
dc.date.issued2021-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59489
dc.provenance.editstepusermeghan.oneill@imec.be
dc.title

Towards improved atom probe tomography analysis of semiconductors: unraveling the dynamic evolution of the semiconductor emitter

dc.typePHD thesis
dspace.entity.typePublication
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