Publication:
Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture
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2006 since deposited on 2021-10-14
1last month
Acq. date: 2026-06-03
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Statistics
Views
2006 since deposited on 2021-10-14
1last month
Acq. date: 2026-06-03
Citations