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Correlative 3D strain analysis in nanometer-sized semiconductor devices by precession electron diffraction, raman spectroscopy and FE simulations
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1980 since deposited on 2021-10-24
Acq. date: 2026-05-28
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Statistics
Views
1980 since deposited on 2021-10-24
Acq. date: 2026-05-28
Citations