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Nitrogen profile and dielectric cap layer (Al2O3, Dy2O3, La2O3) engineering on Hf-silicate
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Acq. date: 2026-10-13
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1 since deposited on 2021-10-16
Acq. date: 2026-10-13
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2000 since deposited on 2021-10-16
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Acq. date: 2026-10-13
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