Publication:

Investigation of the hermeticity of BCB-dealed cavities for housing (RF-) MEMS devices

Date

2002

Proceedings Paper

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Author(s)

;

;

Pamidighantam, Sayanu

;

Tilmans, Harrie

Statistics

1910 since deposited on 2021-10-14

Acq. date: 2026-10-12