Publication:

Impact of acid statistics on EUV local critical dimension uniformity

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2257903

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36902.pdf 779.41 KB

Author(s)

;

De Simone, Danilo

;

Yildirim, Oktay

;

Meeuwissen, Marieke

;

Hoefnagels, Rik

;

;

;

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