Publication:

Study on Alternative Dipole Material Wet Clean by pH Controlled Functional Water

Date

2023
Proceedings Paper
https://doi.org/10.4028/p-qqi9w5
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Author(s)

Tanaka, Yoichi  
;
Gan, Nobuko
;
Ogawa, Yuuichi
;
Iino, Hideaki
;
Homkar, Suvidyakumar  
;
Chang, Ren-Jie  
;
Alessio Verni, Giuseppe  
;
Givens, Michael  
;
Lai, Ju Geng
;
Pacco, Antoine  
;
Brus, Stephan  
;
Arimura, Hiroaki  
;
Oniki, Yusuke  
;
Altamirano Sanchez, Efrain  
;
Holsteyns, Frank  
;
Horiguchi, Naoto  

Journal

Solid State Phenomena Vol. 346

Abstract

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