High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at imec-N10 logic node

Neumann, J.T.; Garbowski, T.; Högele, W.; Korb, T.; Halder, Sandip; Leray, Philippe; Garreis, R.; le Maire, M.; Zeidler, D.

doi:10.1117/12.2257980

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High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at imec-N10 logic node

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2017

Proceedings Paper

https://doi.org/10.1117/12.2257980

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High-throughput multi-beam SEM: quantitative analysis of imaging capabilities at imec-N10 logic node

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