Publication:

Record low contact resistivity to n-type Ge for CMOS and memory applications

Date

2010
Proceedings Paper
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Author(s)

Martens, Koen  
;
Firrincieli, Andrea  
;
Rooyackers, Rita
;
Vincent, Benjamin  
;
Loo, Roger  
;
Locorotondo, Sabrina  
;
Rosseel, Erik  
;
Vandeweyer, Tom  
;
Hellings, Geert  
;
De Jaeger, Brice  
;
Meuris, Marc  
;
Favia, Paola  
;
Bender, Hugo  
;
Douhard, Bastien  
;
Delmotte, Joris
;
Vandervorst, Wilfried  
;
Simoen, Eddy  
;
Jurczak, Gosia  
;
Wouters, Dirk
;
Kittl, Jorge

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