Publication:

CVD based selective Co deposition on Cu and W for via pre-fill

Date

2016

Meeting abstract

Simple item page Full metadata Statistics

Files

33686.pdf 1007.67 KB

Author(s)

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van der Veen, Marleen

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Boemmels, Juergen

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Badaroglu, Mustafa

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Statistics

2103 since deposited on 2021-10-23

Acq. date: 2026-10-12