Publication:

Area-Selective Deposition of AlOx and Al-Silicate for Fully Self- Aligned Via Integration

Date

2023
Journal article
https://doi.org/10.1021/acsami.2c18014
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Author(s)

Pasquali, Mattia  
;
Brady-Boyd, Anita  
;
Lesniewska, Alicja  
;
Carolan, Patrick  
;
Conard, Thierry  
;
O'Connor, Robert
;
De Gendt, Stefan  
;
Armini, Silvia  

Journal

ACS APPLIED MATERIALS & INTERFACES

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