Publication:
Challenges on surface conditioning in 3D device architectures: triple-gate finFETs, gate-all-around lateral and vertical nanowireFETs
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1994 since deposited on 2021-10-24
7last month
Acq. date: 2026-08-16
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Statistics
Views
1994 since deposited on 2021-10-24
7last month
Acq. date: 2026-08-16
Citations