Publication:

EUV mask defectivity: status and mitigation towards HVM

Date

2010

Proceedings Paper

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Files

20875.pdf 1.83 MB

Author(s)

Jonckheere, Rik

;

Van Den Heuvel, Dieter

;

Lamantia, Matthew

;

Baudemprez, Bart

;

Hendrickx, Eric

;

Statistics

1928 since deposited on 2021-10-18

Acq. date: 2026-06-02