Publication:
Nucleation and growth of TiN films deposited by atomic layer deposition
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1931 since deposited on 2021-10-14
2last month
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Acq. date: 2026-10-13
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Statistics
Views
1931 since deposited on 2021-10-14
2last month
1last week
Acq. date: 2026-10-13
Citations