Publication:
Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structures
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2017 since deposited on 2021-10-24
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Acq. date: 2026-08-23
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Statistics
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2017 since deposited on 2021-10-24
4last month
2last week
Acq. date: 2026-08-23
Citations