Publication:
Current understanding and modeling of B diffusion and activation anomalies in preamporphized ultra-shallow junctions
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1980 since deposited on 2021-10-15
1last month
Acq. date: 2026-08-16
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Statistics
Views
1980 since deposited on 2021-10-15
1last month
Acq. date: 2026-08-16
Citations