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Doubling or quadrupling MuGFET Fin integration scheme with higher pattern fidelity, lower CD variation and higher layout efficiency

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1992 since deposited on 2021-10-16
1last month
Acq. date: 2026-08-16

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Views

1992 since deposited on 2021-10-16
1last month
Acq. date: 2026-08-16

Citations