Publication:
Electrical performance comparison of embedded Si1-xGex source/drain junctions processed in 200 mm and 300 mmEpi-reactors
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1958 since deposited on 2021-10-17
1last month
Acq. date: 2026-05-30
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Statistics
Views
1958 since deposited on 2021-10-17
1last month
Acq. date: 2026-05-30
Citations