Publication:
Characterization and barrier properties for Cu metallization of tungsten nitride deposited by PECVD using WF6+N2+H2
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1962 since deposited on 2021-10-01
1last month
Acq. date: 2026-08-16
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Statistics
Views
1962 since deposited on 2021-10-01
1last month
Acq. date: 2026-08-16
Citations