Publication:
Creep in MEMS. Failures in MEMS due to creep, plasticity and processing-microstructures-temperatures related mechanisms
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2013 since deposited on 2021-10-19
4last month
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Acq. date: 2026-08-17
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Statistics
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2013 since deposited on 2021-10-19
4last month
1last week
Acq. date: 2026-08-17
Citations