Publication:

Silicon tip formation by isotropic SF6/HBr based dry etching

Date

2009
Meeting abstract
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Author(s)

Kunnen, Eddy
;
Severi, Simone  
;
Verheyen, Peter  
;
Dupont, Tania  
;
Van Hoof, Rita  
;
Vleugels, Frank  
;
Heck, J.
;
Belov, N.
;
Decoutere, Stefaan  
;
Boullart, Werner  

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