Publication:

Dry Etching of III-V Layers for Monolithic Optical Device Fabrication on Si

Date

2022-09-20
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Author(s)

Milenin, Alexey  
;
Yudistira, Didit  
;
De Koninck, Yannick  
;
Baryshnikova, Marina  
;
Kunert, Bernardette  
;
Verheyen, Peter  
;
Van Campenhout, Joris  
;
Pantouvaki, Marianna  
;
Chan, BT  

Journal

N/A

Abstract

Description

Statistics

Views

963 since deposited on 2022-09-26
1last month
Acq. date: 2026-05-30

Citations

Statistics

Views

963 since deposited on 2022-09-26
1last month
Acq. date: 2026-05-30

Citations