Publication:

28nm-pitch Ru interconnects patterned with 0.33NA-EUV single exposure

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2600937

Simple item page Full metadata Statistics

Author(s)

;

;

Mahmud Ul Hasan, Hasan MD

;

;

;

;

Leray, Philippe

;

;

;

Mohsen, Mahmoud

;

;

De Poortere, Etienne

Journal

Proceedings of SPIE

Statistics

1657 since deposited on 2022-05-22

Acq. date: 2026-06-02