Publication:
Scalability and reliability of TaN/HfN/HfO2 gate stack fabricated by a high temperature process
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1980 since deposited on 2021-10-16
1last month
Acq. date: 2026-05-29
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Statistics
Views
1980 since deposited on 2021-10-16
1last month
Acq. date: 2026-05-29
Citations