Publication:

Au-free CMOS-compatible AlGaN/GaN HEMT processing on 200 mm Si substrates

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2061 since deposited on 2021-10-20
9last month
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Acq. date: 2026-08-18

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2061 since deposited on 2021-10-20
9last month
1last week
Acq. date: 2026-08-18

Citations