Publication:

Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

Date

2017
Proceedings Paper
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Author(s)

Guissi, Sofiane  
;
Clark, William
;
Juncker, Aurélie
;
Ervin, J.
;
Greiner, K.
;
Fried, D.
;
Briggs, Basoene  
;
Devriendt, Katia  
;
Sebaai, Farid  
;
Charley, Anne-Laure  
;
Wilson, Chris  
;
Boemmels, Juergen  
;
Tokei, Zsolt  

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