Publication:

Band edge work function metal gates using PEALD TaCN electrodes

Date

2009
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Author(s)

Maes, Jan  
;
Swerts, Johan  
;
Pierreux, Dieter  
;
Machkaoutsan, Vladimir  
;
Marcus, Steven
;
Milligan, Brennan
;
Schram, Tom  
;
Ragnarsson, Lars-Ake  
;
Cacciato, Antonio
;
Rohr, Erika
;
Rothschild, Aude
;
Hendrickx, Paul  
;
Breuil, Laurent  
;
Van den Bosch, Geert  

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